Nonlinear analysis and control of the uncertain micro-electro-mechanical system by using a fuzzy sliding mode control design

This study analyzes the chaotic behavior of a micromechanical resonator with electrostatic forces on both sides and investigates the control of chaos. A phase portrait, maximum Lyapunov exponent and bifurcation diagram are used to find the chaotic dynamics of this micro-electro-mechanical system (MEMS). To suppress chaotic motion, a robust fuzzy sliding mode controller (FSMC) is designed to turn the chaotic motion into a periodic motion even when the MEMS has system uncertainties.